The LACS type alignment stage has the same structure as the existing LAC series that controls Xθ, XYθ 2 axes or 3 axes, respectively. However, because the driving method uses a precisely ground lead screw rather than a ball screw, it is manufactured with such precision that the repeatability achieves an accuracy of 1um/pulse. In addition, the area of the top plate is 40x40mm 60x60mm which is smaller than the size of the existing LAC series, and the overall size and thickness are smaller than the existing LAC series because the substrate sensor is attached, making it possible to compact the equipment. A cross roller was used for the movement guide.

Handling the Stage

Model	LACS3-40	LACS3-60
Stage Surface (mm)	40 x 40	60 x 60
Stroke X,Y,θ(mm)	±5,±5,±3°	±5,±5,±3°
Travel Guide	lead screw M4x0.5P Crossroller Guide	lead screw M4x0.5P Crossroller Guide
Resolution	XY:0.001mm/Pulse(Full Step)　　　　　 θ:≒0.0022/Pulse(Full Step)	XY:0.001mm/Pulse(Full Step)　　 θ:≒0.0016/Pulse(Full Step)
Maximum Speed	XY:2mm/sec(300rpm or low)　　　　　 θ:≒4.41/sec(300rpm or low)	XY:2mm/sec(300rpm or low) 　　　 θ:≒3.18/sec(300rpm or low)
Repeatability	XY:±1.5㎛ θ:±0.0035°	XY:±1.5㎛ θ:±0.0025°
Parallelism (mm)	0.03	0.03
Load Capacity (Kg)	1	1
Motor	5-phase Step motor (PK513PB)	5-phase Step motor (PK513PB)
Sensor	Board sensor 2-limits	Board sensor 2-limits
Material	Aluminum & Steel	Aluminum & Steel
Weight (Kg)	1	1.1

LACS3-40

LACS3-60

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